Method for the manufacture of an electrodisplacive actuator array
Patent 5735026 Issued on April 7, 1998. Estimated Expiration Date: 
April 7, 2015. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.
April 7, 2015. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.Patent ReferencesPiezoelectric actuator Electrostrictive mirror actuator for use in optical projection system Method for manufacturing an electrodisplacive actuated mirror array Actuator array and method for the manufacture thereof Thin film actuated mirror array having an improved optical efficiency Array of electrodisplacive actuated mirrors and method for the manufacture thereof Patent #: 5552923 InventorAssigneeApplicationNo. 278472 filed on 07/20/1994US Classes:29/25.35, PIEZOELECTRIC DEVICE MAKING359/224, Reflective element moved by deformable support359/291, Shape or contour of light control surface altered359/850Plural mirrors or reflecting surfacesExaminersPrimary: Hughes, S. ThomasAttorney, Agent or FirmInternational ClassesG02B 026/00H01L 041/22 Foreign Application Priority Data1993-07-21 KRAbstractThe inventive method for the manufacturing an array of M×N electrodisplacive actuated mirrors comprises a step of: preparing a ceramic wafer, made of an electrodisplacive material, having a top and bottom surface; forming an array of M×N first electrodes and an array of M+1 second electrodes on the bottom and top surface of ceramic wafer, respectively; mounting the ceramic wafer on top of an active matrix; covering each of the M +1 second electrodes with an insulating layer; forming a set of M trenches; placing an array of M×N hinges on the top surface of the ceramic wafer; and forming a mirror on the top surface of each of the M×N hinges to thereby form an array of M×N electrodisplacive actuated mirrors.Field of SearchPIEZOELECTRIC DEVICE MAKINGAssembling formed circuit to base Assembling to base an electrical component, e.g., capacitor, etc. Reflective element moved by deformable support Plural modulation cells Shape or contour of light control surface altered Having multiple electrodes Plural mirrors or reflecting surfaces Composite or echelon mirrors or light concentrating array UNITARY PLURAL REFRACTING SURFACES Plural With mechanical energy coupling means | |
