Method and apparatus for aligning and supporting semiconductor process gas delivery and regulation components
Patent 5732744 Issued on March 31, 1998. Estimated Expiration Date: 
March 8, 2016. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.
March 8, 2016. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.Patent References 1722236 2761714 3414219 Tube clamp mounting Pipe supporting apparatus Pipe support system Method and apparatus for piping support Slide rail system for aeration diffusers and mixers Patent #: 5421383 InventorsAssigneeApplicationNo. 612731 filed on 03/08/1996US Classes:138/106, With external support structure118/715, GAS OR VAPOR DEPOSITION137/315.01, WITH REPAIR, TAPPING, ASSEMBLY, OR DISASSEMBLY MEANS137/613, Flow path with serial valves and/or closures248/65, Brackets248/74.4, Separable285/61WITH SUPPORTExaminersPrimary: Breneman, R. BruceAssistant: Lund, Jeffrie R. Foreign Patent References
International ClassesF16L 003/00F16L 055/00 F17D 001/02 C23C 016/00 AbstractA mounting system, for supporting semiconductor process gas delivery and control components for assembly and use as a gas stick, aligns the connection union seals between fittings on adjacent components to absorb accumulated stresses resulting from manufacturing tolerances and reduce the likelihood of seal leakage. Components are mounted on individual upper clamp members which are secured to lower clamp members to form a slidable but non-rotatable radially aligned yoke around a rigid elongate support member for subsequent longitudinal positioning and joining of adjacent fittings. | |
