U.S. patents available from 1976 to present.
U.S. patent applications available from 2005 to present.

Mass flow controller with vertical purifier

Patent 5730181 Issued on March 24, 1998. Estimated Expiration Date: Icon_subject December 2, 2016. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.

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Inventors

Assignee

Application

No. 758971 filed on 12/02/1996

US Classes:

137/487.5, Electrically actuated valve73/200With gas and liquid separator

Examiners

Primary: Hepperle, Stephen M.

Attorney, Agent or Firm

Foreign Patent References

  • 0 392 072 A1 EP 10/13/1990
  • WO 90/12239 WO 10/13/1990

International Class

G05D 007/06

Abstract

A mass flow controller and purifier has a canister arranged at right angles to a flow path through the mass flow controller. The canister holds a contaminant scavenging material which a gas stream contacts as it flows to remove a contaminant such as water. A purified process gas stream is fed through a bypass of a mass flow meter. A portion of the gas is supplied to a mass flow sensor which generates a signal indicative of a rate of mass flow. The mass flow signal is amplified and the amplified mass flow signal is linearized in a linearizer. The linearized mass flow signal is fed to a comparator which compares the linearized mass flow signal with an error signal and provides an output signal indicative of a mass rate of flow through the mass flow meter. A valve is connected to the mass flow meter and is controlled by the mass flow meter signal to meter the gas.

Other References

  • "System 3A Hygrometer," Panametrics, Inc., Dec. 1988
  • "M Series Aluminum Oxide Moisture Sensor for Gases and Liquids," Panametrics, Inc., Feb. 1990
  • "System 1/02 Microprocessor-Based Moisture and Oxygen Content Analyzer," Panametrics, Inc., Mar. 199
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