Reticle container with corner holding
Patent 5727685 Issued on March 17, 1998. Estimated Expiration Date: 
July 24, 2016. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.
July 24, 2016. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.Patent References 3615006 Container for holding substrate Container for a sheet-like article Bellows clamp actuator Container holder Universal clamping device Patent #: 5161789 InventorsApplicationNo. 686085 filed on 07/24/1996US Classes:206/455, Photo film or plate206/453, Corner or edge protector206/706, For a circuit board206/740, Terraced or stepped shelves248/154, With clamp or hold-down248/316.5Pivoted jawExaminersPrimary: Sewell, Paul T.Assistant: Bui, Luan K. Attorney, Agent or FirmInternational ClassE65D 073/02AbstractA cassette or box for containing and holding a planar substrate such as a reticle having a clamp bar coupled to corner supports by a spring or flexure and a linkage. A clamp bar is pivotally attached to bottom corner supports and a spring or flexure and linked to a top corner support, such that movement of the load bar causes the corner supports to pivot away from a reticle being held only at the corners. An elevation bar is also used to preposition the reticle in one direction. The present invention greatly facilitates the positioning and handling of a reticle as used in photolithography to manufacture semiconductor devices. Additionally, the present invention greatly reduces particulate contamination.Field of SearchPhoto film or plateFragile or sensitive (e.g., glass mirror) With article retainer For a semiconductor wafer For a circuit board Corner or edge protector Frame for containing single component Including component positioning means In closed box WORK HOLDERS, OR HANDLING DEVICES With clamp or hold-down Clamp Pivoted jaw Means for simultaneous actuation of holders Quadrilateral frame type | |
