Patent ReferencesProcess for the preparation of thin films of cadmium sulfide and precursor solutions of cadmium ammonia thiocyanate complex useful therein CuInSe2 thin film solar cell with thin CdS and transparent window layer Method of making a thin film cadmium telluride solar cell Vapor deposition process for depositing an organo-metallic compound layer on a substrate Methods of making pn CdTe/CdS thin film solar cells Process for RF sputtering of cadmium telluride photovoltaic cell Patent #: 5393675 Inventors
AssigneeApplicationNo. 648544 filed on 05/16/1996US Classes:438/99, HAVING ORGANIC SEMICONDUCTIVE COMPONENT136/244, Panel or array136/260, Cadmium containing136/264, Selenium or tellurium containing136/265, Copper, lead, or zinc containing257/E31.007, Comprising only heterojunction including Group I-III-VI compound (e.g., CdS/CuInSe 2 heterojunction) (EPO)427/74, Photoelectric427/226, HEAT DECOMPOSITION OF APPLIED COATING OR BASE MATERIAL427/255.33, Zinc (Zn), cadmium (Cd), or mercury (Hg), containing427/255.35Germanium (Ge), tin (Sn), or lead (Pb) containingExaminersPrimary: Weisstuch, AaronAttorney, Agent or FirmForeign Patent References
International ClassH01L 031/18Foreign Application Priority Data1995-05-17 JPAbstractThis invention relates to a manufacturing method of a compound semiconductor thin film derived from a metal sulfide produced by thermal decomposition of a sulfur-containing metal organic compound, the compound containing at least one functional group having at least one metal atom selected from the group consisting of copper, zinc, cadmium, mercury, and lead, and the functional group also containing at least one sulfur atom. Since the obtained metal sulfides are of high-purity and dense, they can be utilized in various photoelectric devices. Particularly, the photoelectric conversion efficiency of a CdS/CdTe system thin film compound semiconductor solar cell can be improved remarkably by employing a layer made of a CdS thin film as a window of the solar cell.Other References
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