Dispatch and conveyer control system for a production control system of a semiconductor substrate
Patent 5696689 Issued on December 9, 1997. Estimated Expiration Date: 
November 27, 2015. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.
November 27, 2015. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.Patent ReferencesMethod for resource allocation for the manufacture of a product Flexible material transport system Computerized management system Method for resource allocation and project control for the production of a product Resource-lot association coordinator Adaptive job scheduling using neural network priority functions Method and apparatus for carrying a variety of products Patent #: 5536128 InventorsAssigneeApplicationNo. 562824 filed on 11/27/1995US Classes:700/121, Integrated circuit production or semiconductor fabrication198/347.1, CONVEYOR SYSTEM HAVING AUXILIARY SECTION FOR STORING ITEMS MOVING BETWEEN SOURCE AND DESTINATION198/576, With means operating successive sections in timed relation414/935, ASSOCIATED WITH SEMICONDUCTOR WAFER HANDLING414/940Wafer cassette transportingExaminersPrimary: Elmore, Reba I.Assistant: Brown, Thomas W. Attorney, Agent or FirmForeign Patent References
International ClassesG06F 019/00B65G 049/07 B65G 037/00 Foreign Application Priority Data1994-11-25 JPAbstractA semiconductor substrate production control system controlling the production of semiconductor substrates grouped as lots so that a delay of each lot between processing operations does not exceed a time limit within which the amount of deterioration of the substrates exceeds permissible levels when plural types and plural lots of semiconductor substrates are arbitrarily provided in a process requiring consecutive processing operations. A first control unit controls the progress of production of the semiconductor substrates per lot and various processing equipment. Storage stations store the lots. First and second processing equipment implement predetermined processing operations on the lots, and a conveyer conveys the lots between the storage unit and the first and second processing equipment. A reserving unit calculates processing starting and ending times of the first and second processing equipment for each lot scheduled to be conveyed thereto so that the leave-over time of each lot, which is the time during which the lots are between processing operations, is kept within a predetermined time limit so that an amount of deterioration of the lot is within permissible levels. Finally, a setting unit sets the processing conditions for the first and second processing equipment.Field of SearchWith control system responsive to changeable operating instructionsASSOCIATED WITH SEMICONDUCTOR WAFER HANDLING Including wafer orienting means Including means for charging or discharging wafer cassette Wafers positioned vertically within cassette Including wafer charging or discharging means for vacuum chamber Wafer cassette transporting Includes means for gripping wafer With load-supporting pallet By means responsive to presence or condition of load With means controlling the interrelated operation of plural sections With means operating successive sections in timed relation With means for altering the speed (e.g., accelerating, decelerating, stopping, reversing, etc.) of a section Having a cyclically swingable section CONVEYOR SYSTEM HAVING AUXILIARY SECTION FOR STORING ITEMS MOVING BETWEEN SOURCE AND DESTINATION Plural laterally spaced, same direction auxiliary paths By synchronously moving signal carrier distinct from conveyor | |
