U.S. patents available from 1976 to present.
U.S. patent applications available from 2005 to present.

Modular gas box system

Patent 5662143 Issued on September 2, 1997. Estimated Expiration Date: Icon_subject May 16, 2016. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.

Patent References

Power supply system for solenoid valves
Patent #: 4938258
Issued on: 07/03/1990
Inventor: Sato

Control device for fluidic media in particular for compressed air
Patent #: 5222524
Issued on: 06/29/1993
Inventor: Sekler, et al.

Valve base plate assembly Patent #: 5301717
Issued on: 04/12/1994
Inventor: Goedecke

Inventor

Assignee

Application

No. 648771 filed on 05/16/1996

US Classes:

137/884, Sectional block structure137/269, CONVERTIBLE137/560COMBINED

Examiners

Primary: Lee, Kevin

Attorney, Agent or Firm

International Class

F16K 011/00

Abstract

A modular gas box system comprises a series of modules that each connect into upper and lower manifolds that distribute reactive and purge gases through weldments and monoblock valves. A motherboard distributes power, control signals, and pneumatics air to all the plug-in modules. Environmental modules provide vent and purge lines to the process' reaction chambers. An embedded microcomputer manages in situ system and safety diagnostics for each and every module that has been assigned a motherboard address. Each gas module 24 is easy to remove and replace and the pneumatics control motherboard integrates pneumatics distribution, analog-to-digital converters, device controllers and support electronics. Gas module 24s include digital mass flow controllers, analog and digital pressure switches and transducers, gas filters and pneumatic valves.

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