Microstructure, process for manufacturing thereof and devices incorporating the same
Patent 5658698 Issued on August 19, 1997. Estimated Expiration Date: 
January 26, 2015. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.
January 26, 2015. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.Patent ReferencesElectrostatic micromotor Spatial light modulator and method Method of forming microfabricated cantilever stylus with integrated pyramidal tip Patent #: 5221415 InventorsAssigneeApplicationNo. 378610 filed on 01/26/1995US Classes:430/11, Structurally defined310/309, Electrostatic430/311, Making electrical device430/320Making named articleExaminersPrimary: Duda, KathleenAttorney, Agent or FirmForeign Patent References
International ClassesG03F 007/00H02N 001/00 Foreign Application Priority Data1994-01-31 JPAbstractA microstructure comprising a substrate (1), a patterned structure (beam member) (2) suspended over the substrate (1) with an air-space (4) therebetween and supporting structure (3) for suspending the patterned structure (2) over the substrate (1).The microstructure is prepared by using a sacrificial layer (7) which is removed to form the space between the substrate (1) and the patterned structure (2) adhered to the sacrificial layer. In the case of using resin as the material of the sacrificial layer, the sacrificial layer can be removed without causing sticking, and an electrode can be provided on the patterned structure.The microstructure can have application as electrostatic actuator etc., depending on choice of shape and composition.Other References
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