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Method of making a semiconductor laser device

Patent 5648295 Issued on July 15, 1997. Estimated Expiration Date: Icon_subject July 29, 2016. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.

Patent References

Method of diffusing silicon into compound semiconductors and compound semiconductor devices
Patent #: 5047366
Issued on: 09/10/1991
Inventor: Murakami

Method of forming current barriers in semiconductor lasers
Patent #: 5219785
Issued on: 06/15/1993
Inventor: Welch, et al.

Method for the making of optoelectronic semiconductor devices
Patent #: 5232867
Issued on: 08/03/1993
Inventor: de Cremoux, et al.

Semiconductor laser device
Patent #: 5253265
Issued on: 10/12/1993
Inventor: Seko, et al.

Top emitting VCSEL with implant
Patent #: 5256596
Issued on: 10/26/1993
Inventor: Ackley, et al.

Semiconductor laser
Patent #: 5275969
Issued on: 01/04/1994
Inventor: Takahashi

Method for producing P-type impurity induced layer disordering
Patent #: 5376583
Issued on: 12/27/1994
Inventor: Northrup, et al.

Method of manufacturing a semi conductor device having a second well formed within a first well
Patent #: 5460984
Issued on: 10/24/1995
Inventor: Yoshida

Method of making a stripe-geometry II/VI semiconductor gain-guided injection laser structure using ion implantation Patent #: 5567646
Issued on: 10/22/1996
Inventor: Haberern

Inventors

Assignee

Application

No. 687938 filed on 07/29/1996

US Classes:

438/45, Dopant introduction into semiconductor region438/36Ordered or disordered

Examiners

Primary: Bowers, Charles L. Jr.
Assistant: Paladugu, Ramamohan Rao

Attorney, Agent or Firm

Foreign Patent References

  • 4-219989 JP. 08/25/1992
  • 6-53605 JP. 02/25/1994
  • 6-53604 JP. 02/25/1994

International Class

H01L 021/20

Foreign Application Priority Data

1994-09-06 JP

Abstract

A semiconductor laser device in which semiconductor layers of an n-type cladding layer, a quantum well active layer 106, a p-type cladding layer, and an intermediate layer are formed on an n-type GaAs substrate in successive order, and a mixed-crystal is formed in a region except the semiconductor layers of the contact layer and the lower part of the contact layer by diffusing Si into the structure from above the intermediate layer, characterized in that the contact layer and the intermediate layer are made of n-type or nonconductive semiconductor material, and a p-type low-resistance region, formed by diffusing Zn into the structure from above the contact layer, is profiled so as not to overlap with the mixed-crystal region formed by Si diffusion.

Other References

  • Dallesasse, et al., "Impurity-induced layer disordering in In0.5 (Alx Ga1-x) 0.5 P-InGaP quantum-well heterostructure: Visible-spectrum-buried heterostructure lasers," Jul. 15, 1989, J. Appl. Phys. vol. 66, pp. 482-487
  • Meehan, et al., "Zn disordering of Ga0.5 In0.5 P-(Alx Ga1-x)0.5 In0.5 P quantum well heterostructure grown by metalorganic chemical vapor deposition," Appl. Phys. Letter, vol. 54, May 22, 1989, pp. 2136-213
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