Cleaning apparatus having a contact buffer apparatus
Device having brush for scrubbing substrate
Substrate treating apparatus Patent #: 5485644
ApplicationNo. 495216 filed on 06/28/1995
US Classes:15/77, Sheet, bar, and plate cleaners15/21.1, Brushing15/88.2Work moves past rotatable brush
ExaminersPrimary: Scherbel, David A.
Assistant: Chin, Randall E.
Attorney, Agent or Firm
Foreign Patent References
International ClassA46B 013/02
Foreign Application Priority Data1994-06-30 JP
AbstractA plurality of brush support arms, each having a distal end unit brush attached thereto, stand by in juxtaposition in a standby position. The brush support arm having a desired brush attached thereto is selected from the plurality of brush support arms. Then, the selected brush support arm is connected at its proximal end to a distal end of a swing arm. The brush support arm engaged with the swing arm is swung with the swing arm about a pivotal point at a proximal end of the swing arm. As a result, the brush attached to the distal end of the selected brush support arm is moved between the standby position and the center of a substrate, to clean the substrate with this brush. Upon completion of this substrate cleaning, the brush support arm is returned to the standby position. A different brush support arm is selected in the standby position for use in a subsequent cleaning operation, and the substrate is cleaned with the brush connected to this different brush support arm.