On-line ozonation in ultra pure water membrane filtration
May 16, 2016. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.Patent ReferencesMethod of producing ultrapure, pyrogen-free water Metal oxide porous ceramic membranes with small pore sizes Process and system for purifying pure water or ultrapure water Pyrogens separations by ceramic ultrafiltration Recovery and reuse of water-based cleaners Bacteria removal by ceramic microfiltration Procedure for the preparation of microporous ceramic membranes for the separation of gas and liquid mixtures System and method for treating water Method and apparatus for sterilization of and treatment with ozonized water Water treatment method and apparatus therefor InventorsAssigneeApplicationNo. 648919 filed on 05/16/1996US Classes:210/651, Removing specified material210/636, Including cleaning or sterilizing of apparatus210/650, Filtering through membrane (e.g., ultrafiltration)210/653, Utilizing specified membrane material210/760, Utilizing ozone210/900ULTRA PURE WATER (E.G., CONDUCTIVITY WATER)ExaminersPrimary: Fortuna, AnaAttorney, Agent or FirmForeign Patent References
International ClassB01D 061/00AbstractParticle filtration of a feed of highly corrosive ultra pure water and contaminants is disclosed through a metal oxide membrane on ceramic support in combination with on-line ozonation. In one aspect, the filtering of ultra pure water includes passing the feed cross-flow through a multichannel sintered monolithic metal oxide membrane on ceramic support to form a permeate of particle-free ultra pure water. Although high recoveries per pass rates were used, no detectable metal ions including aluminum, zirconium, or yttrium ions were found in the ultra pure water permeate. The apparatus and process of the present invention for filtering ultra pure water include cross-flow filtration using multichannel monolithic ceramic membranes at suitable pore sizes in a total chemical process system including elevated temperatures and on-line ozonation sterilization of the ceramic membrane particle filter in high purity water applications for electronics manufacturing.Other References
Field of SearchIncluding cleaning or sterilizing of apparatusRemoving specified material Utilizing ozone ULTRA PURE WATER (E.G., CONDUCTIVITY WATER) Filtering through membrane (e.g., ultrafiltration) Hyperfiltration (e.g., reverse osmosis, etc.) Glass Utilizing specified membrane material By chemically modifying or inhibiting dispersed constituent | |
