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Elastomeric micro electro mechanical systems

Patent 5642015 Issued on June 24, 1997. Estimated Expiration Date: Icon_subject May 1, 2015. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.

Patent References

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Issued on: 01/16/1996
Inventor: Gregg

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Inventors

Assignee

Application

No. 431735 filed on 05/01/1995

US Classes:

310/309Electrostatic

Examiners

Primary: Budd, Mark O.

Attorney, Agent or Firm

Foreign Patent References

  • WO95/02464 WO. 01/13/1995

International Class

H02N 001/08

Abstract

An electromechanical transducer having a substrate bearing a plurality of elastomeric microstructures with a microelectrode on each microstructure. A power supply is connected to the microelectrodes for controlled application to them of an electrical potential which alternately induces forces of attraction between adjacent pairs of microelectrodes, causing controlled, time-varying displacement of the microelectrodes. Alternatively, a further plurality of microelectrodes (or one or more macroelectrodes) are elastomerically supported above the microelectrodes, with the power supply being connected to the macroelectrode(s) such that the electrical potential applied between the microelectrodes and macroelectrode(s) alternately induces forces of attraction between the microelectrodes and macroelectrode(s), causing controlled, time-varying displacement of the microelectrodes relative to the macroelectrode(s). The macroelectrode(s) can also be applied to a side of the substrate opposite the microstructures.

Other References

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