Abstract

A transferring device is provided for transferring an article between vacuum chambers. The transferring device comprises a cylindrical float member, and a transferring rod connected to and extending along an axial direction for supporting an article. At least one magnetic member is disposed on a peripheral surface of the float member. A cylindrical partition member having a thin, uniform circular cross-sectional thickness is disposed between the electromagnet and the float member. A support member is disposed within the partition member for reciprocating movement between opposite ends of the partition member. The support member supports at least one electromagnet and at least one sensor in spaced apart and facing relation with respect to the magnetic member for magnetically floating the float member and to drive the same in the axial direction. During reciprocating movement of the support member within the partition member, the magnetic force generated by each of the electromagnets acts on each magnetic member through the cylindrical partition member to move the float member in synchronism with the reciprocative motion of the support member. The current required to excite the electromagnets is reduced, and the transferring device can be designed in small scale with high mechanical strength and rigidity.