Patent References 3245307 Interferometric measuring system Method and system for surface contouring Non-contact measurement of surface profile Method and apparatus for reconstruction of three-dimensional surfaces from interference fringes Apparatus and method for projection moire topography Moire microscope Method and apparatus for surface profilometry Field shift moire system Method and apparatus for absolute Moire distance measurements using a grating printed on or attached to a surface InventorsApplicationNo. 262130 filed on 06/17/1994US Classes:356/619, Quadrature detection250/237GGratings (moire fringes)ExaminersPrimary: Gonzalez, FrankAssistant: Eisenberg, Jason D. Foreign Patent References
International ClassesG01B 011/24G01B 011/00 AbstractAn optical measuring system comprises an illumination arrangement including a light source, grating, and lens, and an image acquisition arrangement, including a lens, grating, and camera. A mechanical translation device moves the grating in a plane parallel to a reference surface to effect a phase shift of a projected image of the grating on the contoured surface to be measured. A second mechanical translation device moves the lens to effect a change in the contour interval. A first phase of the points on the contoured surface is taken, via a four-bucket algorithm, at a first contour interval. A second phase of the points is taken at a second contour interval. A controller, including a computer, determines a coarse measurement using the difference between the first and second phases. The controller further determines a fine measurement using either the first or second phase. The displacement or distance, relative to the reference plane, of each point is determined, via the controller, using the fine and coarse measurements.Other References
Field of SearchGratings (moire fringes) | |