Method of eliminating errors in images derived from patterns which consist of periodically arranged individual images
Light illumination device
Holographic method for producing desired wavefront transformations
Optical apparatus using polarized light
Observation apparatus with selective light diffusion
Projection optical apparatus
ApplicationNo. 483866 filed on 06/07/1995
US Classes:359/562, For changing zeroth order intensity355/53, Step and repeat355/67, Illumination systems or details359/558, DIFFRACTION359/619By surface composed of lenticular elements
ExaminersPrimary: Dzierzynski, Paul M.
Assistant: Chang, Audrey
Attorney, Agent or Firm
Foreign Patent References
International ClassesG02B 005/18
Foreign Application Priority Data1991-08-02 JP
AbstractAn edge emphasis type phase shift reticle is illuminated obliquely, and zeroth order diffraction light and first order diffraction light caused by a fine pattern of the reticle and having substantially the same intensity are incident and distributed on a pupil of a projection optical system, symmetrically with respect to a predetermined axis, whereby the fine pattern is imaged with use of the zeroth order diffraction light and first order diffraction light.