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Method of eliminating errors in images derived from patterns which consist of periodically arranged individual images
Patent #: 4159164
Issued on: 06/26/1979
Inventor: Dammann ,   et al.

Light illumination device
Patent #: 4497015
Issued on: 01/29/1985
Inventor: Konno ,   et al.

Exposure apparatus
Patent #: 4521082
Issued on: 06/04/1985
Inventor: Suzuki ,   et al.

Holographic method for producing desired wavefront transformations
Patent #: 4547037
Issued on: 10/15/1985
Inventor: Case

Optical apparatus using polarized light
Patent #: 4634240
Issued on: 01/06/1987
Inventor: Suzuki ,   et al.

Observation apparatus with selective light diffusion
Patent #: 4645924
Issued on: 02/24/1987
Inventor: Suzuki ,   et al.

Projection optical apparatus
Patent #: 4668077
Issued on: 05/26/1987
Inventor: Tanaka

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Method and apparatus for projection printing
Patent #: 4746958
Issued on: 05/24/1988
Inventor: Yamakawa

Pattern position detecting method and apparatus for detecting the position of an alignment direction of a wafer target pattern
Patent #: 4777374
Issued on: 10/11/1988
Inventor: Nakata ,   et al.

Projection exposure apparatus
Patent #: 4780747
Issued on: 10/25/1988
Inventor: Suzuki ,   et al.

Illuminance distribution measuring system
Patent #: 4799791
Issued on: 01/24/1989
Inventor: Echizen ,   et al.

Scan and repeat high resolution projection lithography system
Patent #: 4924257
Issued on: 05/08/1990
Inventor: Jain

Projection exposure apparatus
Patent #: 4931830
Issued on: 06/05/1990
Inventor: Suwa, et al.

Projection optical apparatus capable of measurement and compensation of distortion affecting reticle/wafer alignment
Patent #: 4943733
Issued on: 07/24/1990
Inventor: Mori, et al.

Illuminating optical device
Patent #: 4947030
Issued on: 08/07/1990
Inventor: Takahashi

Resolution doubling lithography technique
Patent #: 4947413
Issued on: 08/07/1990
Inventor: Jewell, et al.

Illumination device
Patent #: 4988188
Issued on: 01/29/1991
Inventor: Ohta

Optically imaging method and apparatus
Patent #: 5061956
Issued on: 10/29/1991
Inventor: Takubo, et al.

Illuminance distribution measuring system
Patent #: 5067811
Issued on: 11/26/1991
Inventor: Ouchi

Energy amount control device
Patent #: 5097291
Issued on: 03/17/1992
Inventor: Suzuki

Exposure method and apparatus
Patent #: 5121160
Issued on: 06/09/1992
Inventor: Sano, et al.

Projection aligner
Patent #: 5144362
Issued on: 09/01/1992
Inventor: Kamon, et al.

Device for detecting position of a light source with source position adjusting means
Patent #: 5153419
Issued on: 10/06/1992
Inventor: Takahashi

Projection exposure apparatus
Patent #: 5160962
Issued on: 11/03/1992
Inventor: Miura, et al.

Exposure control apparatus
Patent #: 5191374
Issued on: 03/02/1993
Inventor: Hazama, et al.

Method of fabricating phase shift reticles
Patent #: 5194345
Issued on: 03/16/1993
Inventor: Rolfson

5237367

Illuminating optical apparatus and exposure apparatus having the same
Patent #: 5245384
Issued on: 09/14/1993
Inventor: Mori

Fly-eye lens device and lighting system including same
Patent #: 5251067
Issued on: 10/05/1993
Inventor: Kamon

Projection aligner
Patent #: 5253040
Issued on: 10/12/1993
Inventor: Kamon, et al.

Projection exposure apparatus
Patent #: 5264898
Issued on: 11/23/1993
Inventor: Kamon, et al.

Projection exposure apparatus and method, a semiconductor device manufacturing system and method, and a semiconductor device manufactured by illuminating an original having a circuit pattern when the original and a wafer are in a focused state
Patent #: 5286963
Issued on: 02/15/1994
Inventor: Torigoe

Projection exposure apparatus
Patent #: 5287142
Issued on: 02/15/1994
Inventor: Kamon

Illuminating apparatus and projection exposure apparatus provided with such an illuminating apparatus
Patent #: 5296892
Issued on: 03/22/1994
Inventor: Mori

Projection exposure apparatus and semiconductor device manufacturing method Patent #: 5436692
Issued on: 07/25/1995
Inventor: Noguchi