Integrated gas panel

Patent 5605179 Issued on February 25, 1997. Estimated Expiration Date:

March 17, 2015. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.

Abstract Claims Description Full Text

Patent References

3915194

Modular color changers with improved valves and manifolds
Patent #: 4657047
Issued on: 04/14/1987
Inventor: Kolibas

Valve base plate assembly
Patent #: 5301717
Issued on: 04/12/1994
Inventor: Goedecke

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Patent #: 5368062
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Processing apparatus and flow control arrangement therefor Patent #: 5439026
Issued on: 08/08/1995
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Inventors

Assignee

Insync Systems, Inc.

Application

No. 404485 filed on 03/17/1995

US Classes:

137/884, Sectional block structure137/240With separate material addition

Examiners

Primary: Fox, John C.

Attorney, Agent or Firm

Blakely, Sokoloff, Taylor & Zafman

International Class

F16K 011/10

Abstract

A novel integrated gas panel is described. The integrated gas panel of the present invention, comprises a plurality of individual process gas modules or blocks coupled together with a plurality of gaskets located between them. Each process gas module comprises an upstream isolation valve coupled between a process gas inlet and an MFC inlet. An upstream purge valve is coupled between an upstream purge port and the MFC inlet. A mass flow controller is coupled between the MFC inlet and an MFC outlet. A mix isolation valve is coupled between the MFC outlet and a mix port. The modules are coupled together such that respective ports of each module are in fluid communication with one another to form a common tube or port. Gaskets placed between the various modules either allow or block the flow of gas between ports of adjacent modules. By arranging blocks and gaskets in different ways, gas panels with a wide variety of different functions and capabilities can be easily designed and fabricated.