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US Patent 5594666 - Mass flow control system

US Patent Issued on January 14, 1997
Estimated Patent Expiration Date: Icon_subject December 19, 2014Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.
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Abstract

A mass flow controller includes a photoelectric transducer for receiving information through an optical fiber and an electro-optical transducer for transmitting the result of detection of the mass flow through the optical fiber, thereby transmitting and receiving information through the optical fiber. Accordingly, the transmission and reception of data between the host computer and the mass flow controller performed through the optical fiber are not affected by electro-magnetic noise. Further, the mass flow controller can include a correction device responsive to a command from the host computer for correcting the result of a detection, to thereby accurately process the result of the detection because the result of the detection is corrected as required and then transmitted to the host computer as the correct data.

Inventors

Application

No. 358468 filed on 12/19/1994

US Classes:

702/100Fluid or fluid flow measurement

Field of Search

73/204.15, Including detail of feedback or rebalancing circuitry73/861VOLUME OR RATE OF FLOW

Examiners

Primary: Cosimano, Edward R.

Attorney, Agent or Firm

US Patent References

4527557, Medical ventilator system
Issued on: 07/09/1985
Inventor: DeVries ,   et al.
5263369, Flow sensor system and method
Issued on: 11/23/1993
Inventor: Cutler
5329966, Gas flow controller
Issued on: 07/19/1994
Inventor: Fenimore, et al.
5469750, Method and apparatus for sensing flow in two directions and automatic calibration thereof
Issued on: 11/28/1995
Inventor: Lloyd, et al.
5474062, Medical ventilator
Issued on: 12/12/1995
Inventor: DeVires, et al.
5494028Medical ventilator
Issued on: 02/27/1996
Inventor: DeVries, et al.

International Class

G01F 025/00

Foreign Application Priority Data

1993-12-20 JP

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