Light illumination device
Illumination optical system
Apparatus for forming a fold-over soft center-filled confection
ApplicationNo. 436070 filed on 05/05/1995
US Classes:355/67, Illumination systems or details353/32, Lenticular film359/619, By surface composed of lenticular elements359/620, Having particular composition362/268Plural serial lens elements or components
ExaminersPrimary: Grimley, Arthur T.
Assistant: Kerner, Herbert V.
Attorney, Agent or Firm
Foreign Patent References
International ClassesF21V 029/00
Foreign Application Priority Data1994-05-09 JP
AbstractA projection exposure apparatus including a light source system, an optical integrator for forming a plurality of light source images, and a condenser optical system for illuminating a target illumination surface in a rectangular or circular arc pattern in a multiple manner. The optical integrator has, from a light source side, a first lens group which has a plurality of first lens element groups each consisting of a plurality of first lens elements, and a second lens group which has a plurality of second lens element groups each consisting of a plurality of second lens elements. The second lens elements are arranged in a one-to-one correspondence with the first lens elements, and dimensions of the lens section of the first and second lens element satisfy a predetermined relations.
Field of SearchStep and repeat
Illumination systems or details
Including shutter, diaphragm, polarizer or filter
By surface composed of lenticular elements
Having particular composition
Plural lenticular plates
With multipart element
Including translucent or transparent modifier
Plural serial lens elements or components
UNITARY PLURAL REFRACTING SURFACES
SIMULTANEOUS PROJECTION AND MANUAL DELINEATION