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UV/EB curable butyl copolymers for lithographic and corrosion-resistant coating applications

Patent 5591551 Issued on January 7, 1997. Estimated Expiration Date: Icon_subject June 7, 2015. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.

Patent References

3002003

3096311

3100702

X-ray mask and a manufacture method therefor
Patent #: 4873162
Issued on: 10/10/1989
Inventor: Yoshioka, et al.

Process for manufacturing a photomask Patent #: 4876164
Issued on: 10/24/1989
Inventor: Watakabe, et al.

Inventors

Assignee

Application

No. 474870 filed on 06/07/1995

US Classes:

430/18Including resin or synthetic polymer

Examiners

Primary: Lesmes, George F.
Assistant: Codd, Bernard

Attorney, Agent or Firm

International Class

G03C 003/00

Abstract

A lithographic coating and method of framing a lithographic image are disclosed. The method comprises coating at least a portion of a surface of an article with a radiation-crosslinkable polymer, and exposing the coated surface to a pattern of radiation to crosslink the polymer in a lithographic image. The functionalized polymer is a copolymer of an isoolefin of 4 to 7 carbon atoms and para-alkylstyrene, wherein the para-alkylstyrene is functionalized with a radiation reactive group at the para-alkyl group of the para-alkylstyrene.

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