Laterally driven resonant microstructures
Micromotion mechanical structure and a process for the production thereof
Digital capacitive accelerometer Patent #: 5447068
ApplicationNo. 511184 filed on 08/04/1995
US Classes:73/514.32, Capacitive sensor361/283.3By differential capacitor
ExaminersPrimary: Williams, Hezron
Assistant: Moller, Richard A.
Attorney, Agent or Firm
Foreign Patent References
International ClassG01P 015/125
Foreign Application Priority Data1994-09-02 DE
AbstractIn an acceleration sensor having a multiplicity of movable electrodes, a first group of fixed electrodes is arranged on one side of the movable electrodes and a second group of fixed electrodes is arranged on the other side of the movable electrodes. The fixed electrodes of the first group are suspended from a connecting beam and are connected in parallel electrically by the latter. The fixed electrodes of the second group are anchored individually on the substrate and are connected in parallel electrically by means of a connecting conductor track.