Unit magnification projection system and method
November 30, 2014. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.Patent ReferencesOptical projection and scanning apparatus Unit-power concentric optical systems Compact image projection apparatus Achromatic unit magnification optical system Beam-splitting optical system Restricted off-axis field optical system Photolithographic projection apparatus using light in the far ultraviolet Apparatus for projecting a series of images onto dies of a semiconductor wafer Step-and-repeat alignment and exposure system Method and apparatus for optical system adjustments InventorsAssigneeApplicationNo. 347818 filed on 11/30/1994US Classes:359/364, With curved reflective imaging element355/53, Step and repeat359/650, Having four components359/720, Asymmetric (e.g., prismatic or eccentric, etc.)359/727, Including concave or convex reflecting surface359/737, With diverse refracting element359/900METHODSExaminersPrimary: Dzierzynski, Paul M.Assistant: Juba, John Jr. Attorney, Agent or FirmInternational ClassG02B 017/00AbstractA Dyson lens system includes a radiation source, a concave mirror, and a plano-convex lens. There is also incorporated in the system an additional lens that is spaced from the plano-convex lens a large part of the distance from the plano-convex lens to the mirror. A roof prism and a turning prism are provided to conduct radiation from the radiation source to the plano-convex lens and also from the plano-convex lens to an image plane. An image adjustor or compensator is provided between the prisms and either the image plane or an object plane--the latter being disposed between the radiation source and the prisms. An adjustment mechanism is provided to effect highly accurate adjustment of the location of the image, the adjustment mechanism including physical shifting to a slight degree of a portion of one or both prisms.Other References
Field of SearchCOMPOUND LENS SYSTEMConcave, convex combination Asymmetric (e.g., prismatic or eccentric, etc.) With reflecting element Including concave or convex reflecting surface Having metal layer With curved reflective imaging element Projection type Having four components Having less than four components With diverse refracting element METHODS Step and repeat | |
