Opto-electro-mechanical device or filter, process for making, and sensors made therefrom
May 23, 2014. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.Patent ReferencesSemiconductor vibration detecting structure Self-oscillating, optical resonant sensor Vibratory transducer Oscillator using H-shaped single crystal silicon vibrator Process for manufacturing a vibrating type transducer Vibrating type transducer Laminated semiconductor sensor with vibrating element Vibrating type pressure measuring device Resonant mechanical sensor Patent #: 5165289 InventorsAssigneeApplicationNo. 247911 filed on 05/23/1994US Classes:257/431, Light73/579, Resonance, frequency, or amplitude study73/778, Vibratory element73/862.59, By measuring vibrations (e.g., resonant frequency)257/415, Physical deformation257/417, Strain sensors257/434, With window means257/436, With means for increasing light absorption (e.g., redirection of unabsorbed light)257/E31.001SEMICONDUCTOR DEVICES RESPONSIVE OR SENSITIVE TO ELECTROMAGNETIC RADIATION (E.G., INFRARED RADIATION, ADAPTED FOR CONVERSION OF RADIATION INTO ELECTRICAL ENERGY OR FOR CONTROL OF ELECTRICAL ENERGY BY SUCH RADIATION PROCESSES, OR APPARATUS PECULIAR TO MANUFACTURE OR TREATMENT OF SUCH DEVICES, OR OF PARTS THEREOF) (EPO)ExaminersPrimary: Crane, Sara W.Attorney, Agent or FirmForeign Patent References
International ClassH01L 029/82AbstractThe present invention relates to microstructures fabricated from semiconductor material and having a flexible member which is excited into various modes of resonance and in which such resonance is read optically. By coupling the microstructure to a surface or material of interest, a drive means will excite the flexible member into a characteristic resonance which when read optically gives indication of certain physical phenomena influencing the surface or material of interest. The microstructures of the present invention may be configured to self-resonate, as a so-called active device, under certain conditions. Many different physical phenomena may be quantified using the device of the present invention.Other References
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