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Field effect transistor

Patent 5504353 Issued on April 2, 1996. Estimated Expiration Date: Icon_subject June 5, 2015. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.

Patent References

Compound semiconductor device Patent #: 5313093
Issued on: 05/17/1994
Inventor: Nakagawa

Inventor

Assignee

Application

No. 461025 filed on 06/05/1995

US Classes:

257/194, Doping on side of heterojunction with lower carrier affinity (e.g., high electron mobility transistor (HEMT))257/284, Schottky gate in groove257/615, Group III-V compound (e.g., InP)257/745, Contact for III-V material257/E29.25With more than one donor layer (EPO)

Examiners

Primary: Prenty, Mark V.

Attorney, Agent or Firm

Foreign Patent References

  • 60-86872 JP 05/19/1985
  • 62-252975 JP 11/19/1987
  • 63-228763 JP 09/19/1988
  • 4-199641 JP 07/19/1992

International Class

H01L 031/032.8

Foreign Application Priority Data

1994-06-06 JP

Abstract

A buffer layer 2 composed of undoped GaAs or undoped AlGaAs, an n-type AlGaAs electron supply layer 3, an undoped InGaAs channel layer 4, an AlGaAs electron supply layer 5 composed of n-type AlGaAs or undoped AlGaAs, an n-type InGaP contact lower layer 16, and an n-type GaAs contact upper layer 7 are formed on a semiinsulating GaAs substrate 1. A gate electrode is formed on the AlGaAs electron supply layer 5. A drain electrode and a source electrode are formed on the GaAs contact upper layer 7. Thus, in the FET with double-recess structure, the drain current can be increased and the gate breakdown voltage can be improved.

Other References

  • "Super Low-Noise GaAs MESFET's with a Deep-Recess Structure"; IEE Transactions on Electron Devices, vol. ED-27; No. 6; Jun. 1990; pp. 1029-1034
  • Huang, J. C., et al; "An AlGaAs/InGaAs Pseudomorphic High Electron . . . " IEEE MTT-S Digest, pp. 713-716, 1991
  • Takikawa, M., et al; "Pseudomorphic N-InGaP/InGaAs/GaAs High . . . " IEEE Electron Device Letters, vol. 14, No. 6, Aug. 199
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