Gas handling device assembly used for a CVD apparatus

Patent 5488925 Issued on February 6, 1996. Estimated Expiration Date:

August 11, 2014. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.

Abstract Claims Description Full Text

Patent References

3654960

3665961

3698432

3756274

Fluid pressure-operated systems
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Patent #: 5250323
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Inventor: Miyazaki

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Issued on: 10/12/1993
Inventor: Stauffer

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Inventor

Kumada, Masatoshi

Application

No. 288926 filed on 08/11/1994

US Classes:

118/715, GAS OR VAPOR DEPOSITION137/884Sectional block structure

Examiners

Primary: Breneman, R. Bruce
Assistant: Lund, Jeffrie R.

Attorney, Agent or Firm

Armstrong, Westerman, Hattori, McLeland & Naughton

Foreign Patent References

152121 JP 07/13/1987

International Class

C23C 016/00

Foreign Application Priority Data

1993-10-28 JP

Abstract

There is provided a gas handling device assembly of which one of gas handling devices can be removed from the gas handling device assembly without loosening other component devices. The gas handling device assembly has a base plate having a top surface and a bottom surface opposite to the top surface. A plurality of through holes extending from the top surface to the bottom surface are formed in the base plate so that the gas flows through the through holes. There is provided a gas-handling device having a mount surface via which the gas-handling device is fixed to the base plate, an inlet port and an outlet port for the gas being formed on the mount surface so that each of the inlet port and the outlet port is connected to one of through holes of the base plate. There is also provided a connecting tube having a first connecting member on one end and a second connecting member on the other end, the first connecting member and the second connecting member facing toward the same direction. The gas handling device is fixed to the top surface of the base plate, and the connecting tube is fixed to the bottom surface of the base plate so that the gas handling device, the through holes, and the connecting tube, together form a predetermined gas-flow circuit.