Scanning auger microprobe with variable axial aperture
Charged particle spectrometers
Electron spectroscopy system for chemical analysis of electrically isolated specimens
Electronic spectrometer for identifying element conditions of a sample surface by utilizing an energy spectrum of charged particles
ApplicationNo. 201912 filed on 02/25/1994
US Classes:250/305, ELECTRON ENERGY ANALYSIS250/306INSPECTION OF SOLIDS OR LIQUIDS BY CHARGED PARTICLES
ExaminersPrimary: Dzierzynski, Paul M.
Assistant: Nguyen, Hiep T.
Attorney, Agent or Firm
International ClassH01J 049/48
AbstractAn instrument for surface analysis includes rastering an electron beam across an anode to generate x-rays. A concave Bragg monochromator focuses an energy peak of the x-rays to a specimen surface, the x-rays rastering the surface to emit photoelectrons. An analyzer provides information on the photoelectrons and thereby chemical species in the surface. A second detector of low energy photoelectrons is cooperative with the rastering to produce a scanning photoelectron image of the surface for imaging of the specimen. Alternatively a lens formed of two concave grids transits the photoelectrons to the analyzer with selectively modified energy so that the analyzer detects either higher energy electrons characteristic of chemical species or lower electrons for the image. The monochromator is formed of platelets cut from an array of platelets in a single crystal member. For imaging of insulating specimens, the surface is flooded periodically with electrons, and the signals are omitted from the image during the flooding. For chemometric information summed over the surface of insulators, data from the edges is omitted from the summing.