Method and apparatus for heat treating
Patent 5431561 Issued on July 11, 1995. Estimated Expiration Date: 
December 14, 2013. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.
December 14, 2013. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.Patent ReferencesApparatus for manufacturing semiconductor device Heat-treating apparatus Cage boat having removable slats Method of loading and unloading wafer boat Vertical heat treatment apparatus Patent #: 5221201 InventorsAssigneeApplicationNo. 166014 filed on 12/14/1993US Classes:432/253, ACCESSORY MEANS FOR HOLDING, SHIELDING OR SUPPORTING WORK WITHIN FURNACE432/152Having distinct atmosphere supply, removal or recirculation structureExaminersPrimary: Dolinar, Andrew M.Attorney, Agent or FirmInternational ClassF27D 005/00Foreign Application Priority Data1990-11-30 JPAbstractA method and an apparatus for heat treating in a heat treating apparatus having a heating chamber to be introduced with predetermined gas, a heater disposed around the heating chamber, and jigs disposed in the heating chamber for supporting wafers of a plurality of substrates to be treated in parallel with each other, wherein in order to make the temperature distribution of the wafers of the substrates to be treated in the radial direction uniform in the heat treatment, the jigs are formed to determine the sizes and the shape thereof in predetermined ranges having a gradient according to the heat treating method having a predetermined shape determining procedure so that the jigs are formed in ring-shaped trays (i.e. support-ring) for holding at the peripheries the substrates to be treated and the thickness of the tray is constant or such that the outer peripheral side thereof is thicker than the inner peripheral side thereof.Field of SearchIncluding preparing or arranging work for heatingStacking or aligning objects Removable furnace bottom section or kiln cart Moving unit through or within treating zone during treating Having distinct atmosphere supply, removal or recirculation structure ACCESSORY MEANS FOR HOLDING, SHIELDING OR SUPPORTING WORK WITHIN FURNACE | |
