Patent ReferencesSurface sensor Defect detection system Off-axis light beam defect detector Surface defect detection and confirmation system and method Surface pit detection system and method Panel surface flaw inspection Inspection apparatus and method for detecting flaws on a diffractive surface Method and apparatus for measuring surface flatness Apparatus for detecting deformations in pressed members Particle detector for rough surfaces Patent #: 5189481 Inventors
AssigneeApplicationNo. 981745 filed on 11/25/1992US Classes:250/559.48, With transversal scan356/237.2Surface conditionExaminersPrimary: Nelms, David C.Assistant: Allen, Stephone B. Attorney, Agent or FirmInternational ClassG01N 021/88AbstractA surface pit and mound detection and discrimination system including a device for scanning a beam of radiation over a surface, and a mechanism for detecting a local slope on the surface for differentiating between whether the beam of radiation is scanning a pit or a mound on the surface. | |