U.S. patents available from 1976 to present.
U.S. patent applications available from 2005 to present.

Laser pattern generation apparatus

Patent 5386221 Issued on January 31, 1995. Estimated Expiration Date: Icon_subject November 2, 2012. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.

Patent References

Re33931

Electro-optic pulse imaging raster output scanner
Patent #: 4639073
Issued on: 01/27/1987
Inventor: Yip ,   et al.

Steering mirror
Patent #: 4778233
Issued on: 10/18/1988
Inventor: Christenson ,   et al.

Laser pattern generation apparatus
Patent #: 4796038
Issued on: 01/03/1989
Inventor: Allen ,   et al.

Beam splitting apparatus
Patent #: 4797696
Issued on: 01/10/1989
Inventor: Allen ,   et al.

Pattern generation system Patent #: 4956650
Issued on: 09/11/1990
Inventor: Allen, et al.

Inventors

Assignee

Application

No. 970480 filed on 11/02/1992

US Classes:

347/239Specific light modulator

Examiners

Primary: Reinhart, Mark J.

Attorney, Agent or Firm

International Class

B41J 002/435

Abstract

An improved laser pattern generation apparatus. The improved pattern generation apparatus of the present invention uses a laser beam to expose a radiant sensitive film on the workpiece to print circuit patterns on a substrate. The laser beam is aligned using a beam steering means. The laser beam is split into 32 beams to create a brush. The brush scans the workpiece through use of a rotating polygonal mirror. Each beam of the brush may have one of seventeen intensity values. The beams are modulated by an Acousto-Optical Modulator. Signals provided to the Acousto-Optical Modulator define the pattern to be generated. These signals are created by a rasterizer. Increased print speed is accomplished through the use of a wider brush and a print strategy that eliminates physical stage passes.

Other References

  • Michael L. Rieger, James A. Schoeffel, Paul A. Warkentin, 1988 SPIE Santa Clara Symposium Conference 922-Optical Microlithography VII, Image Quality Enhancements for Raster Scan Lithography, 10 page
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