Manufacturing management and apparatus for a semiconductor device

Patent 5375061 Issued on December 20, 1994. Estimated Expiration Date:

December 20, 2011. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.

Abstract Claims Description Full Text

Patent References

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Inventors

Application

No. 799181 filed on 11/27/1991

US Classes:

700/101, Priority ordering438/980, UTILIZING PROCESS EQUIVALENTS OR OPTIONS700/121Integrated circuit production or semiconductor fabrication

Examiners

Primary: Ruggiero, Joseph

Attorney, Agent or Firm

Foley & Lardner

International Classes

G06F 015/24
G06F 015/46

Foreign Application Priority Data

1990-11-27 JP

Abstract

A production management method in a production system for semiconductor devices uses processing progress information for each of the plural number of manufacturing apparatus as the basis for performing start allocation of a plural number of next start product groups. When the state of progress has reached a certain stage and is close to the end, a product group of the same type as that which a manufacturing apparatus is processing from amongst start standby product groups is determined as the object of same type priority allocation. A link is made beforehand between that product group and a manufacturing apparatus for which that processing is about to end, and a product group that is an object of same type priority allocation to a manufacturing apparatus that is processing products of that same type, is not started by a manufacturing apparatus that is processing a product of a different type even if that manufacturing apparatus finishes its processing of a product of that different type earlier.