Apparatus for performing continuous treatment in vacuum
Interlocking door latch for dockable interface for integrated circuit processing
Transfer device with a double tight barrier between a container and a confinement enclosure
End station for an ion implantation apparatus
Semiconductor processing system
Apparatus for loading and unloading a vacuum processing chamber
Container for the handling of semiconductor devices and process for particle-free transfer
Sealable transportable container having improved latch mechanism
Method of transferring wafers using vacuum
Loading and unloading airlock apparatus for a vacuum treatment chamber Patent #: 5147168
ApplicationNo. 948148 filed on 09/21/1992
US Classes:414/217.1, For carrying Standarized Mechanical Interface (SMIF) type414/416.01Nongravity type
ExaminersPrimary: Huppert, Michael S.
Assistant: Keenan, James W.
Attorney, Agent or Firm
International ClassB65B 001/04
AbstractA method and apparatus for transferring articles from a transportable container, for example, a SMIF pod, to a second container, for example, a processing station having a port which provides access to the interior region of the processing station. A non-contact seal or an isolation cover or skirt seals the port so that the interior region of the container can be purged of contaminants prior to exposing the interior environment of the processing station to the environment within the container. The purging of the container may be a multi-step process in which the container door is moved between several intermediate positions so that the container door itself is purged prior to the purging of the environment within the container.