Method and apparatus for transferring articles between two controlled environments
September 21, 2012. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.Patent ReferencesApparatus for performing continuous treatment in vacuum Interlocking door latch for dockable interface for integrated circuit processing Transfer device with a double tight barrier between a container and a confinement enclosure End station for an ion implantation apparatus Semiconductor processing system Apparatus for loading and unloading a vacuum processing chamber Container for the handling of semiconductor devices and process for particle-free transfer Sealable transportable container having improved latch mechanism Method of transferring wafers using vacuum Loading and unloading airlock apparatus for a vacuum treatment chamber Patent #: 5147168 InventorsAssigneeApplicationNo. 948148 filed on 09/21/1992US Classes:414/217.1, For carrying Standarized Mechanical Interface (SMIF) type414/416.01Nongravity typeExaminersPrimary: Huppert, Michael S.Assistant: Keenan, James W. Attorney, Agent or FirmInternational ClassB65B 001/04AbstractA method and apparatus for transferring articles from a transportable container, for example, a SMIF pod, to a second container, for example, a processing station having a port which provides access to the interior region of the processing station. A non-contact seal or an isolation cover or skirt seals the port so that the interior region of the container can be purged of contaminants prior to exposing the interior environment of the processing station to the environment within the container. The purging of the container may be a multi-step process in which the container door is moved between several intermediate positions so that the container door itself is purged prior to the purging of the environment within the container. | |
