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Aerosol-plasma deposition of films for electronic cells

Patent 5366770 Issued on November 22, 1994. Estimated Expiration Date: Icon_subject September 13, 2013. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.

Patent References

Fabrication of solid oxide fuel cell by electrochemical vapor deposition
Patent #: 4831965
Issued on: 05/23/1989
Inventor: Brian ,   et al.

Deposition of superconducting thick films by spray inductively coupled plasma method
Patent #: 5032568
Issued on: 07/16/1991
Inventor: Lau, et al.

Process for preparing oxide superconducting films by radio-frequency generated aerosol-plasma deposition in atmosphere
Patent #: 5120703
Issued on: 06/09/1992
Inventor: Snyder, et al.

Aerosol-plasma deposition of films for electrochemical cells Patent #: 5260105
Issued on: 11/09/1993
Inventor: Wang

Inventor

Application

No. 120581 filed on 09/13/1993

US Classes:

505/477, Using plasma427/62, Superconductor427/226, HEAT DECOMPOSITION OF APPLIED COATING OR BASE MATERIAL427/419.1, Metallic compound-containing coating427/419.2, Oxide-containing coating427/565, Sonic or ultrasonic (e.g., vibratory energy, etc.)427/569, Plasma (e.g., corona, glow discharge, cold plasma, etc.)427/576, Metal, metal alloy, or metal oxide coating427/600, Sonic or ultrasonic429/30, Solid electrolyte505/702, Josephson junction present505/704Wire, fiber, or cable

Examiners

Primary: King, Roy V.

Attorney, Agent or Firm

International Classes

B05D 003/06
B05D 003/02

Abstract

An atmospheric process for the production of a coating of film upon a nickel-containing substrate. In the first step of this process, an aerosol mist containing reactants necessary to form the coating is provided. Thereafter, the mist is subjected to radio-frequency radiation while in the plasma region. Thereafter, the vaporized mixture is then deposited onto a nickel substrate. In subsequent steps, one or more other layers of vaporized material may be deposited onto the coated substrate.

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