Diamond growth by microwave generated plasma flame
December 17, 2012. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.Patent ReferencesMethod of and apparatus for igniting a high-frequency torch to create a high-temperature plasma of high purity Method for treating a material using radiofrequency waves Microwave plasma production apparatus Microwave plasma torch, device comprising such a torch and process for manufacturing powder by the use thereof Intra-microspray ICP torch Microwave induced plasma torch with tantalum injector probe Spectroscopic plasma torch for microwave induced plasmas Method for deposition of hexagonal diamond using hydrogen plasma jet Patent #: 5243170 InventorsAssigneeApplicationNo. 994060 filed on 12/17/1992US Classes:117/102, With significant flow manipulation or condition, other than merely specifying the components or their sequence or both117/103, Using an energy beam or field, a particle beam or field, or a plasma (e.g., ionization, PECVD, CBE, MOMBE, RF induction, laser)117/929, Carbon (e.g., diamond) {C30B 29/04}219/121.41, Methods219/121.43, With chamber219/121.49, Cooling system219/121.51, Gas supply system219/121.59, Methods219/686, Gas environment (e.g., pressurized, etc.)427/575Generated by microwave (i.e., 1mm to 1m)ExaminersPrimary: Paschall, Mark H.Attorney, Agent or FirmForeign Patent References
International ClassB23K 010/00AbstractA swirl flow microwave plasma torch is provided for the growth of diamond films. The swirl flow torch incorporates an injection nozzle that directs reactant gases into a cylindrical flow tube extending through the center of a tuned microwave cavity. The outer surface of the nozzle comprises a contoured, conical shape that causes inert gas, directed tangentially against the outer surface of the nozzle, to swift in a helical path that surrounds and confines the reactant gas emerging from the nozzle. The tuned cavity is coupled to a microwave energy source to generate a highly localized plasma in the reactant gas in the center of the sheathing swirl of inert gas. The swirl of inert gas contains the plasma in a well-defined shape, prevents in-diffusion of undesirable gases, forms a boundary layer to prevent plasma migration, and provides flow tube cooling. The reactant gas flow forces the plasma out of the flow tube to form a plasma flame that can be impinged on a substrate to induce diamond growth. | |
