Line threader device
Solid state force transducer, support and method of making same
Solid state force transducer and method of making same
Mechanical resonator arrangements
Planar semiconductor three direction acceleration detecting device and method of fabrication
Electrostatically deformographic switches
Miniaturized accelerometer with piezoelectric FET
Low cost capacitive accelerometer
ApplicationNo. 028922 filed on 03/04/1993
US Classes:73/514.18, Electrostatic restoring means73/514.32Capacitive sensor
ExaminersPrimary: Chapman, Jeanette E.
Attorney, Agent or Firm
Foreign Patent References
International ClassG01P 015/125
AbstractAn accelerometer comprising a microfabricated acceleration sensor and monolithically fabricated signal conditioning circuitry. The sensor comprises a differential capacitor arrangement formed by a pair of capacitors. Each capacitor has two electrodes, one of which it shares electrically in common with the other capacitor. One of the electrodes (e.g., the common electrode) is movable and one of the electrodes is stationary in response to applied acceleration. The electrodes are all formed of polysilicon members suspended above a silicon substrate. Each of the capacitors is formed of a plurality of pairs of electrode segments electrically connected in parallel and, in the case of the movable electrodes, mechanically connected to move in unison. When the substrate is accelerated, the movable electrodes move such that the capacitance of one of the capacitors increases, while that of the other capacitor decreases. The two capacitors are connected to signal conditioning circuitry which converts this differential capacitance into a corresponding voltage. Both open loop and force-balance operation are shown.
Field of SearchResponsive to external condition