Process gas distribution system and method with gas cabinet exhaust flow control
January 13, 2013. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.Patent ReferencesFume hood Differential pressure apparatus for measuring flow and velocity Process and apparatus for determining flow rate of a flow medium in a flow line Ventilated clean room work station with aerodynamic exhaust baffle High speed leak tester Air flow monitor and temperature compensating circuit therefor Apparatus and method for controlling functions of automated gas cabinets Single-chamber apparatus for in-situ generation of dangerous polyatomic gases and radicals from a source material contained within a porous foamed structure Fluid velocity measurement device for a generating bank tube Patent #: 5170672 InventorsAssigneeApplicationNo. 003550 filed on 01/13/1993US Classes:702/47, Pressure, resistive, or capacitive sensor73/861.42, Using differential pressure340/606Flow rateExaminersPrimary: Black, Thomas G.Assistant: Zanelli, Michael J. Attorney, Agent or FirmInternational ClassesG06F 015/46G01F 001/34 AbstractGas flow control units in cabinets are connected to distribute process gas, on demand, to a plurality of utilization locations known as "tool" locations in a semi-conductor manufacturing plant. Each gas flow control cabinet has an exhaust duct which connects to an exhaust duct in the plant through which waste gases from the cabinet are exhausted by a fan to the atmosphere. Low flow alarm signals are generated if the exhaust flow is below a desired level. A programmable controller is provided for controlling the alarm function according to the size of the exhaust ducting from the plant so as to facilitate installation and operation of each cabinet in a variety of locations with different duct sizes. | |
