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ApplicationNo. 006070 filed on 01/15/1993
US Classes:204/229.4, With programmed, cyclic, or time responsive current, voltage, or power control means204/230.7, Having auxiliary electrode204/267, Plural cells204/269, With feeding and/or withdrawal means204/270, Gas204/273, With agitator204/284Perforated or foraminous
ExaminersPrimary: Valentine, Donald R.
Attorney, Agent or Firm
International ClassesC25D 017/02
AbstractA multi-compartment electroplating system for electroplating two or more objects simultaneously such that the electrodeposited material is substantially uniform in thickness and composition. Electroplating solution is circulated between a reservoir and a multi-compartment tank which has one cathode-paddle-anode (CPA) assembly for each compartment. Each CPA assembly has an anode, a cathode adapted for holding a wafer and employing a single thieving electrode which covers all of the floor of the compartment not covered by the wafer, and a paddle. Also included is a cover which houses a single linear motor for driving all of the paddles in synchrony.