Abstract

A preferred embodiment of the present invention provides a method of addressing a digital micromirror device (DMD) having an array of electromechanical pixels (20) comprising deflectable beams (30) wherein each of the pixels (20) assume one of two or more selected stable states according to a set of selective address voltages. A first step of the preferred method is electromechanically latching, by applying a bias voltage with an AC and a DC component to the array of pixels (20), each of the pixels (20) in one of the selected stable states. A second step is applying a new set of selective address voltages to all the pixels (20) in the array. A third step is electromechanically unlatching, by removing the bias voltage from the array, the pixels (20) from their previously addressed state. A fourth step is allowing the array of pixels (20) to assume a new state in accordance with the new set of selective address voltages. A fifth step is electromechanically latching, by reestablishing the bias voltage with the AC component and the DC component, each of the pixels (20 ). Other devices, systems and methods are also disclosed.

Other References

• Hornbeck , Larry J., 128×128 Deformable Mirror Device, IEEE Transactions on Electron Devices, vol. ED-30, No. 5, May 1983, pp. 539-54