Method and device for measuring temperature radiation using a pyrometer wherein compensation lamps are used
Patent 5271084 Issued on December 14, 1993. Estimated Expiration Date: 
October 6, 2012. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.
October 6, 2012. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.Patent References 2611541 3358974 3376748 3462224 3796099 3884075 3916690 Thermal reference apparatus Method of and an apparatus for measuring surface temperature and emmissivity of a heated material Pyrometer #2 InventorsAssigneeApplicationNo. 957443 filed on 10/06/1992US Classes:392/416, With chamber219/411, With infrared generating means356/43, OPTICAL PYROMETERS374/123, Transparent material measurement or compensation (e.g., spectral line, gas, particulate suspension374/126, Having emissivity compensating or specified radiating surface374/161Change of optical propertyExaminersPrimary: Cuchlinski, William A. Jr.Assistant: Gutierrez, Diego Attorney, Agent or FirmForeign Patent References
International ClassesA21B 002/00F26B 019/00 G01J 005/00 G01J 005/10 Foreign Application Priority Data1990-05-23 NLAbstractMethod and apparatus for measuring the radiation originating from one side of a wafer of semiconductor material using a pyrometer, wherein non-blackbody compensation radiation is projected onto that side to compensate for the reflectivity of the wafer of material and wherein the intensity of the non-blackbody compensation radiation is controlled subject to the amount of radiation measured by the pyrometer.Field of SearchTransparent material measurement or compensation (e.g., spectral line, gas, particulate suspensionHaving emissivity compensating or specified radiating surface Comparison with radiation reference standard Change of optical property OPTICAL PYROMETERS Plural color responsive With chamber With infrared generating means | |
