Pulsed laser photoemission electron-beam probe
Patent 5270643 Issued on December 14, 1993. Estimated Expiration Date: 
August 12, 2012. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.
August 12, 2012. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.Patent References 3796947 High frequency test head using electro-optics Ultra-high-speed digital test system using electro-optic signal sampling Electron beam measuring instrument Electro-optic sampling system clock and stimulus pattern generator Method and apparatus for electro-optically measuring a voltage signal Capacitance imaging system using electro-optics Patent #: 5170127 InventorsAssigneeApplicationNo. 928919 filed on 08/12/1992US Classes:324/751, Using electron beam probe324/73.1, PLURAL, AUTOMATICALLY SEQUENTIAL TESTS324/96Using radiant energyExaminersPrimary: Nguyen, Viet Q.Attorney, Agent or FirmForeign Patent References
International ClassG01R 027/26AbstractAn electron-beam test probe system (400) in which a pulsed laser-beam source (404) and a photocathode assembly (430) are used with an electron-beam column (426) to produce a pulsed electron beam at a stabilized repetition frequency. A pulse picker (414) allows the pulse repetition frequency of the pulsed electron beam to be reduced to a submultiple of the pulsed laser repetition frequency. A test pattern generator (416) is programmable to apply a desired pattern of test vector patterns to an electronic circuit to be probed, the test vector patterns being synchronized with the stabilized laser-beam pulse repetition frequency. A timebase circuit (412) allows the test vector patterns to be time-shifted relative to the pulsed electron beam. The electronic circuit under test can thus be probed at any desired point in the applied test vector pattern by control of the pulse picker and by time-shifting the test vector pattern.Other References
Field of SearchPLURAL, AUTOMATICALLY SEQUENTIAL TESTSUsing radiant energy Electron probe type Electron microscope type RADIANT ENERGY GENERATION AND SOURCES IRRADIATION OF OBJECTS OR MATERIAL Irradiation of semiconductor devices Ion or electron beam irradiation BY POLARIZED LIGHT EXAMINATION With registration indicia (e.g., scale) Including polarimeters | |
