Fluid jet seed particle generator for silane pyrolysis reactor
Polysilicon fluid bed process and product
Annular heated fluidized bed reactor
Method of coating silicon particles Patent #: 5041308
ApplicationNo. 865972 filed on 04/09/1992
US Classes:219/628, Fluid or liquid heater219/634, Susceptor373/157, Conducting (e.g., graphite)422/146, With heat exchange means affecting reaction chamber or reactants located therein423/349, From silicon containing compound427/213Fluidized bed utilized
ExaminersPrimary: Reynolds, Bruce A.
Assistant: Hoang, Tu Ba
Attorney, Agent or Firm
Foreign Patent References
International ClassH05B 006/02
AbstractThe inductive heating of a reactor vessel by an external electromagnetic heating source is made more uniform by placing a susceptor between the heating source and the reactor vessel. In preferred embodiments, the reactor vessel is a fluidized bed vessel made of graphite and suitable for the preparation or treatment of polysilicon particles, and the susceptor is also made of graphite.