Micromechanical structure
February 3, 2012. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.Patent ReferencesMethod for the production of semiconductor devices with an integral heatsink and of related semiconductor equipment Liquid transport device and method Micromechanical elements and methods for their fabrication Scanning device for microline-by-microline illumination and optically scanning a planar original Microelectrochemical sensor and sensor array Monolithic fabrication techniques for front face optoelectronic couplers and/or optical components including ridge structured waveguides Patent #: 4895615 InventorsAssigneeApplicationNo. 830755 filed on 02/03/1992US Classes:422/102, Container257/E27.006, Including piezo-electric, electro-resistive, or magneto-resistive component (EPO)422/63, Sample mechanical transport means in or for automated analytical system422/68.1, Means for analyzing liquid or solid sample422/82.11, Waveguides422/943, Specially adapted for heating or cooling samples [B01L 3/00C2D2]435/288.4Including multiple compartments (e.g., wells, etc.)ExaminersPrimary: Warden, Robert J.Assistant: Trembley, T. A. Attorney, Agent or FirmForeign Patent References
International ClassesG01N 021/00C12M 001/00 Foreign Application Priority Data1988-06-01 DEAbstractA micromechanical structure with cavities, containers, openings, canals, depressions, humps or the like for examinations of sample substances for possible changes of physical and/or chemical properties with targeted evaluation and documentation for the purposes of biotechnology, gene technology, cell and immune research and other medical, agricultural and environment research, where the structure consists of semiconducting material (of the group III to V of the elements of the periodic system) or contain the latter or glass or ceramic, diamond, or carbon and is made by a masking technique, especially by a chemical etching technique.Other References
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