Indirect temperature-measurement of films formed on semiconductor wafers
April 3, 2012. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.Patent References 3539807 Interchangeable networks with non-linear sensors and method of producing such networks Surface temperature measuring apparatus for object within furnace Method of and an apparatus for measuring surface temperature and emmissivity of a heated material Pulse cooled thermocouple system for high temperature measurement especially in combustion turbines Non-contact sensing apparatus and method for polymer melt temperature profile determination Pyrometer measurements in the presence of intense ambient radiation Method and apparatus for determining temperature in a blackbody radiation sensing system Pyrometric measurement procedure and multi-channel pyrometer Radiation thermometry InventorsAssigneeApplicationNo. 864185 filed on 04/03/1992US Classes:702/135, Infrared250/339.04, Including temperature determining means356/45, Plural color responsive374/121, By thermally emitted radiation374/132Sensor or mounting temperature controlExaminersPrimary: Harvey, Jack B.Assistant: Pipala, Edward Attorney, Agent or FirmInternational ClassG01J 005/00Foreign Application Priority Data1989-03-31 JPAbstractA method of measuring the temperature of a matter accurately, in non-contact fashion and without setting any emissivity comprising obtaining a spectral characteristics of absorbing electromagnetic waves inherent to a matter whose temperature is to be measured, obtaining those absorption peak wavelengths of the electromagnetic waves which correspond to two or more high points of electromagnetic wave absorption rate obtained from the spectral characteristics, measuring amounts of the electromagnetic waves, which have the absorption peak wavelengths, radiated from the temperature-measured matter, and calculating the temperature of the matter from blues of the radiant amounts of the electromagnetic waves thus measured.Field of SearchHaving emissivity compensating or specified radiating surfaceHaving significant frequency limitation or relationship (e.g., peak, ratio) Having significant signal handling circuitry (e.g., linearizing, emissivity compensation) With holder for shaking EMISSIVITY DETERMINATION In spaced noncontact relationship to specimen By thermally emitted radiation Sensor or mounting temperature control Ambient temperature compensated (e.g., dummy sensor) Pyroelectric type Plural beam/detector pairs OPTICAL PYROMETERS Plural color responsive | |
