Micromachined rate and acceleration sensor

Patent 5241861 Issued on September 7, 1993. Estimated Expiration Date:

February 8, 2011. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.

Abstract Claims Description Full Text

Patent References

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Inventor

Hulsing, II, Rand H.

Assignee

Sundstrand Corporation

Application

No. 653533 filed on 02/08/1991

US Classes:

73/514.02, Angular acceleration73/504.04Vibratory mass

Examiners

Primary: Chapman, Jeanette E.

Attorney, Agent or Firm

McAndrews, Held & Malloy, Ltd.

International Classes

G01P 009/04
G01P 015/08

Abstract

A sensor (10) is disclosed for measuring the specific force and angular rotation rate of a moving body and is micromachined from a silicon substrate (16). First and second accelerometers (32a and b) are micromachined from the silicon substrate (16), each having a force sensing axis (38) and producing an output signal of the acceleration of the moving body along its force sensing axis (38). The first and second accelerometers (32a and b) are mounted within the substrate (16) to be moved along a vibration axis (41). The first and second accelerometers (32a and b) are vibrated or dithered to increase the Coriolis component of the output signals from the first and second accelerometers (32a and b). A sinusoidal drive signal of a predetermined frequency is applied to a conductive path (92) disposed on each of the accelerometers. Further, magnetic flux is directed to cross each of the conductive paths (92), whereby the interaction of the magnetic flux and of the drive signal passing therethrough causes the desired dithering motion. A link (72) is formed within the silicon substrate (16) and connected to each of the accelerometers (32a and b), whereby motion imparted to one results in a like, but opposite motion applied to the other accelerometer (32). Further, a unitary magnet (20) and its associated flux path assembly direct and focus the magnetic flux through the first and second accelerometers (32a and b) formed within the silicon substrate (16).

Other References

Albert P. Pisano, "Resonant-Structure Micromotors," Micro Electro Mechanical Systems, Feb. 20-22, 1989, IEEE Catalog No. 89TH0249-3, Library of Congress No. 88-83988
William C. Tang, et al., "Laterally Driven Polysilicon Resonant Microstructures," Micro Electro Mechanical Systems, Feb. 20-22, 1989, IEEE Catalog No. 89TH0249-3, Library of Congress No. 88-8398