Resonator force transducer
Apparatus and method for measuring specific force and angular rate
Method for determining acceleration
Angular rate sensor utilizing two vibrating accelerometers secured to a parallelogram linkage
Two axis angular rate and specific force sensor utilizing vibrating accelerometers
Accelerometer with beam resonator force transducer
Digital processor for use with an accelerometer based angular rate sensor
Vibratory angular rate sensing system
Counting apparatus and method for frequency sampling
Apparatus for measuring inertial specific force and angular rate of a moving body
ApplicationNo. 653533 filed on 02/08/1991
US Classes:73/514.02, Angular acceleration73/504.04Vibratory mass
ExaminersPrimary: Chapman, Jeanette E.
Attorney, Agent or Firm
International ClassesG01P 009/04
AbstractA sensor (10) is disclosed for measuring the specific force and angular rotation rate of a moving body and is micromachined from a silicon substrate (16). First and second accelerometers (32a and b) are micromachined from the silicon substrate (16), each having a force sensing axis (38) and producing an output signal of the acceleration of the moving body along its force sensing axis (38). The first and second accelerometers (32a and b) are mounted within the substrate (16) to be moved along a vibration axis (41). The first and second accelerometers (32a and b) are vibrated or dithered to increase the Coriolis component of the output signals from the first and second accelerometers (32a and b). A sinusoidal drive signal of a predetermined frequency is applied to a conductive path (92) disposed on each of the accelerometers. Further, magnetic flux is directed to cross each of the conductive paths (92), whereby the interaction of the magnetic flux and of the drive signal passing therethrough causes the desired dithering motion. A link (72) is formed within the silicon substrate (16) and connected to each of the accelerometers (32a and b), whereby motion imparted to one results in a like, but opposite motion applied to the other accelerometer (32). Further, a unitary magnet (20) and its associated flux path assembly direct and focus the magnetic flux through the first and second accelerometers (32a and b) formed within the silicon substrate (16).