Glint capture system for improving lock stability of coat
Method and apparatus for light-induced scanning-microscope display of specimen parameters and of their distribution
Confocal scanning laser microscope having no moving parts
Microscope system for providing three-dimensional resolution
Pulsed-array video inspection lighting system
Imaging apparatus and methods utilizing scannable microlaser source
ApplicationNo. 789342 filed on 11/08/1991
US Classes:250/234, Means for moving optical system359/397Reference lines or grids
ExaminersPrimary: Nelms, David C.
Assistant: Le, Que T.
Attorney, Agent or Firm
Foreign Patent References
International ClassH01J 003/14
Foreign Application Priority Data1990-11-10 DE
AbstractA device is described for three-dimensional examination with a confocal beam path, in which an illumination grid (12; 22; 31; 83) is imaged in a focal plane (13f; 87), said plane being located on or in the vicinity of surface (14o) of object (14). The radiation reflected in the focal plane is imaged directly by a beam splitter onto the receiving surface of a CCD receiver (17; 91). The illumination grid (12; 22; 31; 83) is then imaged on the receiver surface either by the photosensitive areas of the receiver acting as confocal diaphragms or by signals from the detector elements which only receive light scattered outside focal plane (13f; 87) not being taken into account in the evaluation or being taken into account separately.The illumination grid size generated in focal plane (13f; 87) can be either fixed or variable. A variable illumination grid size can be produced for example by an LED array. The device also makes examinations in transmitted light possible.
Field of SearchPlural photosensitive image detecting element arrays
Following a target (e.g., a star or instrument pointer or other object) other than a pattern
Optical or pre-photocell system
Means for moving optical system
Louvered or grid type
Adjustable or positionable
With illumination and viewing paths coaxial at the image field
Reference lines or grids