Semiconductor object pre-aligning apparatus
April 24, 2012. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.Patent ReferencesSurface measurement instruments Wafer alignment station Edge finding in wafers Apparatus for aligning circular objects Method and system for locating and positioning circular workpieces Wafer handling system Wafer centration device Device for positioning a semi-conductor wafer Universal edged-based wafer alignment apparatus Automated wafer inspection system Patent #: 4938654 InventorAssigneeApplicationNo. 873368 filed on 04/24/1992US Classes:414/779, Article support means rotates about a shiftable pivot point356/400, With light detector (e.g., photocell)414/936Including wafer orienting meansExaminersPrimary: Huppert, Michael S.Assistant: Hienz, William M. Attorney, Agent or FirmForeign Patent References
International ClassB65G 047/24AbstractA prealigner for semiconductive wafers is described. The prealigner includes mechanism for holding the wafer in a non-slip manner and motive means for adjusting the position of its engagement with the wafer as necessary to make the geometric center of the wafer precisely coincident with a chosen position.Field of SearchARTICLE REORIENTING DEVICEArticle frictionally engaged and rotated by relatively movable means (e.g., disc, endless belt, etc.) Article support means rotates about a shiftable pivot point By conveying an item that has a position characteristic and rotating the item until it is positioned With control means actuated in response to sensing of improperly faced item Optical With light detector (e.g., photocell) Controlling web, strand, strip, or sheet Center, point, distance between centers, or centerline location | |
