U.S. patents available from 1976 to present.
U.S. patent applications available from 2005 to present.

Optical resonance accelerometer

Patent 5218420 Issued on June 8, 1993. Estimated Expiration Date: Icon_subject April 11, 2011. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.

Patent References

3635562

Acceleration switch
Patent #: 4345124
Issued on: 08/17/1982
Inventor: Abbin, Jr. ,   et al.

Suspension for three-axis accelerometer
Patent #: 4372520
Issued on: 02/08/1983
Inventor: Shutt

External cavity diode laser sensor
Patent #: 4452533
Issued on: 06/05/1984
Inventor: Miles ,   et al.

Method and apparatus for a Fabry-Perot multiple beam fringe sensor
Patent #: 4572669
Issued on: 02/25/1986
Inventor: James ,   et al.

Flight instrument using light interference for pressure sensing
Patent #: 4665747
Issued on: 05/19/1987
Inventor: Muscatell

Fabry-perot interferometer
Patent #: 4825262
Issued on: 04/25/1989
Inventor: Mallinson

Resonant fiber optic accelerometer with noise reduction using a closed loop feedback to vary pathlength Patent #: 4900918
Issued on: 02/13/1990
Inventor: Killian

Inventor

Assignee

Application

No. 684678 filed on 04/11/1991

US Classes:

356/480, Resonant cavity73/514.26, Optical sensor73/514.38Including an elastic support for an inertial element (e.g., spring)

Examiners

Primary: Turner, Samuel A.

Attorney, Agent or Firm

International Class

G01B 009/02

Abstract

An accelerometer includes a mass, a spring diaphragm, a collimating lens, and an optical interferometer formed between the mass and collimating lens. The mass and spring diaphragm are preferably formed from stainless steel, but the spring diaphragm may be formed from silicon and the mass from amorphous quartz. The interferometer exists between a mirrored surface of the mass, and a partially reflective surface of the collimating lens.

Other References

  • Sensor Technology, Nov. 1989, pp. 2-3
  • "A Miniature Fabry-Perot Inerferometer Fabricated Using Silicon Micromachining Techniques", Jerman et al., IEEE TH0215-4/88/000-0016, IEEE 198
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