Patent References 3635562 Acceleration switch Suspension for three-axis accelerometer External cavity diode laser sensor Method and apparatus for a Fabry-Perot multiple beam fringe sensor Flight instrument using light interference for pressure sensing Fabry-perot interferometer Resonant fiber optic accelerometer with noise reduction using a closed loop feedback to vary pathlength Patent #: 4900918 InventorAssigneeApplicationNo. 684678 filed on 04/11/1991US Classes:356/480, Resonant cavity73/514.26, Optical sensor73/514.38Including an elastic support for an inertial element (e.g., spring)ExaminersPrimary: Turner, Samuel A.Attorney, Agent or FirmInternational ClassG01B 009/02AbstractAn accelerometer includes a mass, a spring diaphragm, a collimating lens, and an optical interferometer formed between the mass and collimating lens. The mass and spring diaphragm are preferably formed from stainless steel, but the spring diaphragm may be formed from silicon and the mass from amorphous quartz. The interferometer exists between a mirrored surface of the mass, and a partially reflective surface of the collimating lens.Other References
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