U.S. patents available from 1976 to present.
U.S. patent applications available from 2005 to present.

Icon_funbox Bizarre Patents

Patent No. 5678617

Method and apparatus for making a drink hop along a bar or counter

A method for generating a drink which appears to hop from a remote spot on the bar or counter and take one or more leaps, before landing in a patron's glass.

Newsletter  PatentStorm News

Make the Most of PatentStorm

See this month's Top Inventors and Most Cited Patents.

Stay on top of the latest patents by subscribing to an RSS feed.

Got questions? Ask a Patent Expert!

Registered users: Manage your profile, comments and alerts.

 

US Patent 5217910 - Method of fabricating semiconductor device having sidewall spacers and oblique implantation

US Patent Issued on June 8, 1993
Estimated Patent Expiration Date: Icon_subject October 24, 2011Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.
loading...


View Patent Images (PDF)
(Registered users only)

Abstract

First, a low-concentration impurity layer is formed by obliquely implanting an n-type impurity at a prescribed angle with respect to the surface of a p-type semiconductor substrate, using a gate electrode formed on the semiconductor substrate as a mask. Thereafter a sidewall spacer is formed on the sidewall of the gate electrode, and then a medium-concentration impurity layer is formed by obliquely implanting an n-type impurity to the surface of the semiconductor substrate. Thereafter a high-concentration impurity layer is formed by substantially perpendicularly implanting an n-type impurity with respect to the surface of the semiconductor substrate. According to this method, the low-concentration impurity layer in source and drain regions having triple diffusion structures can be accurately overlapped with the gate electrode, with no requirement for heat treatment for thermal diffusion.

Other References

  • "Fabrication of High-Performance LDDFET's with Oxide Sidewall-Spacer Technology", IEEE Transactions on Electron Devices, vol. ED-29, No. 4, Apr., 1982, by Paul J. Tsang et al, pp. 590-59

Inventors

Application

No. 779498 filed on 10/24/1991

US Classes:

438/231, Plural doping steps257/E21.345, Characterized by the angle between the ion beam and the crystal planes or the main crystal surface (EPO)257/E21.633, With particular manufacturing method of channel, e.g., channel implants, halo or pocket implants, or channel materials (EPO)257/E29.255, With field effect produced by insulated gate (EPO)438/302, Oblique implantation438/305Plural doping steps

Examiners

Primary: Hearn, Brian E.
Assistant: Chaudhari, C.

Attorney, Agent or Firm

US Patent References

4771012, Method of making symmetrically controlled implanted regions using rotational angle of the substrate
Issued on: 09/13/1988
Inventor: Yabu ,   et al.
4843023, Process for forming lightly-doped-drain (LDD) without extra masking steps
Issued on: 06/27/1989
Inventor: Chiu ,   et al.
4891326, Semiconductor device and a process for manufacturing the same
Issued on: 01/02/1990
Inventor: Koyanagi
4978626LDD transistor process having doping sensitive endpoint etching
Issued on: 12/18/1990
Inventor: Poon, et al.

Foreign Patent References

  • 61-139070 JP. 06/22/1986
  • 0113474 JP 05/22/1987
  • 1-212471 JP. 08/22/1989
  • 0065255 JP 03/22/1990
  • 0153538 JP 06/22/1990
  • 0156642 JP 06/22/1990

International Class

H01L 021/265

Foreign Application Priority Data

1990-11-05 JP

Comments

No comments for this page
 
 
Forgot password?
Register here