Multiple array full width electro mechanical modulator
Frame addressed spatial light modulator
Spatial light modulator drive system
Architecture and process for integrating DMD with control circuit substrates Patent #: 5099353
ApplicationNo. 815991 filed on 01/02/1992
US Classes:438/23, Having diverse electrical device216/24, FORMING OR TREATING OPTICAL ARTICLE257/E21.259, Organic layers, e.g., photoresist (EPO)359/291, Shape or contour of light control surface altered359/295, Having multiple electrodes438/619Air bridge structure
ExaminersPrimary: Arnold, Bruce Y.
Assistant: Lester, Evelyn A.
Attorney, Agent or Firm
International ClassesG02B 026/00
AbstractDMD projection light values for HDTV have various manufacturing requirements, including the high yield integration of the DMD superstructure on top of an underlying CMOS address circuit. The CMOS chip surface contains several processing artifacts that can lead to reduced yield for the DMD superstructure. A modified DMD architecture and process are disclosed that minimizes the yield losses caused by these CMOS artifacts while also reducing parasitic coupling of the high voltage reset pulses to the underlying CMOS address circuitry.