U.S. patents available from 1976 to present.
U.S. patent applications available from 2005 to present.

Non-contact techniques for measuring temperature or radiation-heated objects

Patent 5154512 Issued on October 13, 1992. Estimated Expiration Date: Icon_subject April 10, 2010. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.

Patent References

2709367

3288625

3586851

3686940

Unitary lasser/IR seeker
Patent #: 3971939
Issued on: 07/27/1976
Inventor: Andressen

Semiconductor body heater
Patent #: 4101759
Issued on: 07/18/1978
Inventor: Anthony ,   et al.

Optical pyrometer and technique for temperature measurement
Patent #: 4222663
Issued on: 09/16/1980
Inventor: Gebhart ,   et al.

Apparatus for measuring components of liquid samples
Patent #: 4236075
Issued on: 11/25/1980
Inventor: Nexo ,   et al.

Reflector for dental, medical or the like lighting device
Patent #: 4254455
Issued on: 03/03/1981
Inventor: Neal, Jr.

Imaging system for hostile environment optical probe
Patent #: 4408827
Issued on: 10/11/1983
Inventor: Guthrie ,   et al.

More ...

Inventors

Application

No. 507605 filed on 04/10/1990

US Classes:

374/9, EMISSIVITY DETERMINATION250/227.14, Condition responsive light guide (e.g., light guide is physically affected by parameter sensed which results in light conveyed to the photocell)374/32, Total radiant energy or power measurement374/126, Having emissivity compensating or specified radiating surface374/129, Comparison with radiation reference standard374/131, With radiation conducting element392/416With chamber

Examiners

Primary: Yasich, Daniel M.

Attorney, Agent or Firm

Foreign Patent References

  • 57-30916 JP 02/13/1982

International Classes

G01J 005/10
G01N 025/20
H05B 003/62

Abstract

A non-contact pyrometric technique is provided for measuring the temperature and/or emissivity of an object that is being heated by electromagnetic radiation within the optical range. The measurement is made at short wavelengths for the best results. The measurement may be made at wavelengths within those of the heating optical radiation, and the resulting potential error from detecting heating radiation reflected from the object is avoided by one of two specific techniques. A first technique utilizes a mirror positioned between the heating lamps and the object, the mirror reflecting a narrow wavelength band of radiation in which the optical pyrometer detector operates. The second technique is to independently measure the a.c. ripple of the heating lamp radiation and subtract the background optical noise from the detected object signal in order to determine temperature and emissivity of the object. Both of these techniques can be combined, if desired.

Other References

  • "New Ways To Improve RTP Through Optical Fiber Thermometry", Accufiber, Inc., dated Apr. 11, 1989, six pages, (2nd Copy, see Paper No. 9), (6 pages)
  • Stultz, "Rapid Thermal Processing: Equipment Issues for High Volume Production Environments", Peak Systems, Inc., Fremont, Calif., no known date, Four (4) pages
  • Gelpey et al., "Process Control for a Rapid Optical Annealing System", Mat. Res. Soc. Symp. Proc., 1985, pp. 199-207, Nine (9) pages
  • Kato and Iwamatsu, "Rapid Annealing Using Halogen Lamps", J. Electrochem. Soc.: Solid State Science and Technology, vol. 131, No. 5, May 1984, pp. 1145-1152
  • Pettibone et al., "The Effect of Thin Dielectric Films on the Accuracy of Pyrometric Temperature Measurement", Mat. Res. Soc. Symp. Proc., vol. 52, 1986, pp. 209-216
  • Singer, "Will RTP Emerge as the Cinderella Technology of the '90s?", Semiconductor International, Mar. 1989, pp. 76-8
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