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Combined bright field-dark field incident light illumination apparatus Patent #: 4881802
ApplicationNo. 696740 filed on 05/07/1991
US Classes:356/237.2Surface condition
ExaminersPrimary: Rosenberger, Richard A.
Attorney, Agent or Firm
Foreign Patent References
International ClassG01N 021/17
Foreign Application Priority Data1990-05-11 IL
AbstractOptical inspection apparatus includes an illumination system illuminating an area of the workpiece surface with a sky of illumination which is, with respect to each point in the illuminated area, substantially circularly symmetric over a solid angle around the optical axis passing perpendicularly through the electro-optical sensor and the workpiece surface.