Patent ReferencesStatic memory having load polysilicon resistors formed over driver FET drains Static ram cell with trench pull-down transistors and buried-layer ground plate Semiconductor device sram to prevent out-diffusion CMOS device with both p+ and n+ gates Semiconductor device Multiple layer static random access memory device Patent #: 5001539 InventorAssigneeApplicationNo. 647579 filed on 01/30/1991US Classes:438/153, Complementary field effect transistors257/E21.008, Of capacitor (EPO)257/E21.661, Static random access memory structures (SRAM) (EPO)438/210Including passive device (e.g., resistor, capacitor, etc.)ExaminersPrimary: Chaudhuri, OlikAssistant: Trinh, Loc Q. Attorney, Agent or FirmForeign Patent References
International ClassesH01L 021/265H01L 021/70 AbstractThis is an SRAM cell and the cell can comprise: two NMOS drive transistors; two PMOS load transistors; first and second bottom capacitor plates 50, 52, with the first plate 50 being over a gate 34 of one of the drive transistors and the second plate 52 being over a gate 40 of another of the drive transistors; a layer of dielectric material 68 over the first and second bottom capacitor plates; and first and second top capacitor plates 20, 26 over the dielectric layer, with the first top capacitor 20 plate forming a gate of one of the load transistors and with the second top capacitor plate 26 forming a gate of another of the load transistors, whereby the capacitor plates form two cross-coupled capacitors between the gates of the drive transistors and the stability of the cell is enhanced. This is also a method of forming an SRAM cell.Other References
| |